DEVELOPMENTS IN LOW-ENERGY ION-SCATTERING FROM SURFACES

被引：10
作者：
BRONGERSMA, HH
BERGMANS, RH
BUIJS, LGC
JACOBS, JP
KRUSEMAN, AC
SEVERIJNS, CA
VANWELZENIS, RG
机构：
[1] Faculty of Physics, Eindhoven University of Technology, 5600 MB Eindhoven
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1992年 / 68卷 / 1-4期
关键词：
D O I：
10.1016/0168-583X(92)96077-C
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
Low-energy (0.1-10 keV) ion scattering (LEIS) can be used to analyze the atomic composition of the outermost layer of a surface. Possibilities for quantification and in-depth information are discussed. Using a new type of energy analyzer (EARISS) which enables the simultaneous detection of a large part of the energy spectrum, a greatly improved sensitivity is obtained. Even for a catalyst consisting of a highly dispersed carbon support (1000 m2/g) and a low loading of Pd/Pt clusters, the surface composition can be determined using a 2 keV Ne+ ion beam current of only 30 pA.
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收藏
页码：207 / 212
页数：6
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