INFLUENCE OF IMPURITY GASES IN UHV SYSTEMS ON AUGER-ELECTRON SPECTROSCOPY DEPTH PROFILE ANALYSIS

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作者：

MATHIEU, HJ

LANDOLT, D

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JOURNAL DE MICROSCOPIE ET DE SPECTROSCOPIE ELECTRONIQUES | 1978年 / 3卷 / 02期

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TM [电工技术]; TN [电子技术、通信技术];

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0808 ; 0809 ;

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页码：113 / 129

页数：17

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