CHEMICAL EVALUATION OF CU POLYIMIDE INTERFACES

被引：17

作者：

DAVIS, GD

REES, BJ

WHISNANT, PL

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1994年 / 12卷 / 04期

关键词：

D O I：

10.1116/1.579218

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The interactions of copper overlayers with four different polyimides [pyromellitic dianhydride-oxydianiline (PMDA-ODA), benzophenonetetracarboxylic dianhydride-diaminobenzophenone (BTDA-DABP); oxydiphthalic anhydride-oxydianiline (ODPA-ODA); and pyromellitic dianhydride-phenylene diamine (PMDA-PDA)] have been studied by x-ray photoelectron spectroscopy. Emergent etherlike functionalities on polyimides without innate ether groups suggest a copper-induced partial reduction of carbonyl groups. A surface behavior diagram of the carbon chemistry confirms this reaction by indicating a partial conversion of carbonyl moieties to etherlike moieties.

引用

页码：2378 / 2387

页数：10

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