IMPROVED ETCHING TECHNIQUE FOR SIC

[1] Amelinckx S., 1964, DIRECT OBSERVATION D

[2] GABOR T, 1965, ELECTROCHEM TECHNOL, V3, P31

[3] INTERFEROMETRIC STUDY OF ETCHPITS [J]. NATURWISSENSCHAFTEN, 1952, 39 (19) : 448 - 449

[4] HORN FH, 1952, PHILOS MAG, V43, P1210

[5] LEVIN EM, 1964, AM CERAM SOC, V47, P404

[6] DECORATION OF DISLOCATIONS IN ALPHA-SIC BY COPPER [J]. JOURNAL OF APPLIED PHYSICS, 1964, 35 (12) : 3618 - &

[1] Amelinckx S., 1964, DIRECT OBSERVATION D

[2] GABOR T, 1965, ELECTROCHEM TECHNOL, V3, P31

[3] INTERFEROMETRIC STUDY OF ETCHPITS [J]. NATURWISSENSCHAFTEN, 1952, 39 (19) : 448 - 449

[4] HORN FH, 1952, PHILOS MAG, V43, P1210

[5] LEVIN EM, 1964, AM CERAM SOC, V47, P404

[6] DECORATION OF DISLOCATIONS IN ALPHA-SIC BY COPPER [J]. JOURNAL OF APPLIED PHYSICS, 1964, 35 (12) : 3618 - &