DETERMINATION OF URANIUM AND THORIUM AND MEASUREMENT OF ALPHA-PARTICLES IN LSI MATERIALS

被引：12
作者：
KUDO, K
SHIGEMATSU, T
YONEZAWA, H
KOBAYASHI, K
机构：
来源：
JOURNAL OF RADIOANALYTICAL CHEMISTRY | 1981年 / 63卷 / 02期
关键词：
D O I：
10.1007/BF02522220
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
引用
收藏
页码：345 / 351
页数：7
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