DETERMINATION OF URANIUM AND THORIUM AND MEASUREMENT OF ALPHA-PARTICLES IN LSI MATERIALS

被引：12

|

作者：

KUDO, K

SHIGEMATSU, T

YONEZAWA, H

KOBAYASHI, K

机构：

来源：

JOURNAL OF RADIOANALYTICAL CHEMISTRY | 1981年 / 63卷 / 02期

关键词：

D O I：

10.1007/BF02522220

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

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页码：345 / 351

页数：7

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