ACCOMMODATION PUMPING - A NEW PRINCIPLE FOR LOW PRESSURE

被引：36
作者：
HOBSON, JP
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1970年 / 7卷 / 02期
关键词：
D O I：
10.1116/1.1315856
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：351 / &
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