OCTAGONAL WASHER dc SQUIDs AND INTEGRATED SUSCEPTOMETERS FABRICATED IN A PLANARIZED SUB-mu m Nb - AlOx - Nb TECHNOLOGY

被引：22

作者：

Ketchen, M. ^{[1
]}

Pearson, D. J. ^{[1
]}

Stawiasz, K. ^{[1
]}

Hu, C-K. ^{[1
]}

Kleinsasser, A. W. ^{[1
]}

Brunner, T. ^{[1
]}

Cabral, C. ^{[1
]}

Chandrashelchar, V. ^{[1
]}

Jaso, M. ^{[1
]}

Manny, M. ^{[1
]}

Stein, K. ^{[1
]}

Bhushan, M. ^{[2
]}

机构：

[1] IBM Corp, Div Res, TJ Watson Res Ctr, Yorktown Hts, NY 10598 USA

[2] MIT, Lincoln Lab, 244 Wood St, Lexington, MA 02173 USA

来源：

IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY | 1993年 / 3卷 / 01期

关键词：

D O I：

10.1109/77.233334

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We have designed, fabricated and measured a number of Nb - AlOx - Nb octagonal washer dc SQUIDs and miniature dc SQUID susceptometers having minimum feature size down to 0.5 mu m. With SQUID inductance values on the order of 100 pH typical noise performance is better than 1 mu Phi(o)/root Hz. The small minimum feature size of input coils and pickup loop structures will facilitate tight coupling to a wide variety of systems ranging from sub-mu m particles and structures to conventional -mu H input circuits.

引用

页码：1795 / 1799

页数：5

共 8 条

[1] NB/ALOX/NB TRILAYER PROCESS FOR THE FABRICATION OF SUBMICRON JOSEPHSON-JUNCTIONS AND LOW-NOISE DC SQUIDS [J].

BHUSHAN, M ;

MACEDO, EM .

APPLIED PHYSICS LETTERS, 1991, 58 (12) :1323-1325

[2] PERFORMANCE OF DC SQUIDS WITH RESISTIVELY SHUNTED INDUCTANCE [J].

FOGLIETTI, V ;

GALLAGHER, WJ ;

KETCHEN, MB ;

KLEINSASSER, AW ;

KOCH, RH ;

SANDSTROM, RL .

APPLIED PHYSICS LETTERS, 1989, 55 (14) :1451-1453

[3] HIGH-QUALITY REFRACTORY JOSEPHSON TUNNEL-JUNCTIONS UTILIZING THIN ALUMINUM LAYERS [J].

GURVITCH, M ;

WASHINGTON, MA ;

HUGGINS, HA .

APPLIED PHYSICS LETTERS, 1983, 42 (05) :472-474

[4] PLANAR COUPLING SCHEME FOR ULTRA LOW-NOISE DC SQUIDS [J].

JAYCOX, JM ;

KETCHEN, MB .

IEEE TRANSACTIONS ON MAGNETICS, 1981, 17 (01) :400-403

[5] SUB-MU-M, PLANARIZED, NB-ALOX-NB JOSEPHSON PROCESS FOR 125-MM WAFERS DEVELOPED IN PARTNERSHIP WITH SI TECHNOLOGY [J].

KETCHEN, MB ;

PEARSON, D ;

KLEINSASSER, AW ;

HU, CK ;

SMYTH, M ;

LOGAN, J ;

STAWIASZ, K ;

BARAN, E ;

JASO, M ;

ROSS, T ;

PETRILLO, K ;

MANNY, M ;

BASAVAIAH, S ;

BRODSKY, S ;

KAPLAN, SB ;

GALLAGHER, WJ ;

BHUSHAN, M .

APPLIED PHYSICS LETTERS, 1991, 59 (20) :2609-2611

[6] MINIATURE SQUID SUSCEPTOMETER [J].

KETCHEN, MB ;

KOPLEY, T ;

LING, H .

APPLIED PHYSICS LETTERS, 1984, 44 (10) :1008-1010

[7] ULTRA-LOW-NOISE TUNNEL JUNCTION DC SQUID WITH A TIGHTLY COUPLED PLANAR INPUT COIL [J].

KETCHEN, MB ;

JAYCOX, JM .

APPLIED PHYSICS LETTERS, 1982, 40 (08) :736-738

[8] SUB-MU-M LINEWIDTH INPUT COILS FOR LOW T(C) INTEGRATED THIN-FILM DC SUPERCONDUCTING QUANTUM INTERFERENCE DEVICES [J].

KETCHEN, MB ;

STAWIASZ, KG ;

PEARSON, DJ ;

BRUNNER, TA ;

HU, CK ;

JASO, MA ;

MANNY, MP ;

PARSONS, AA ;

STEIN, KJ .

APPLIED PHYSICS LETTERS, 1992, 61 (03) :336-338

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