CATHODIC ARC PLASMA DEPOSITION TECHNOLOGY

被引：87
|
作者：
RANDHAWA, H
机构：
来源：
THIN SOLID FILMS | 1988年 / 167卷 / 1-2期
关键词：
D O I：
10.1016/0040-6090(88)90494-4
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：175 / 185
页数：11
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