GAS SEPARATION MEMBRANES MADE BY PLASMA POLYMERIZATION OF MIXTURES OF SILANES AND FLUOROMETHANE

被引:15
作者
INAGAKI, N
KATSUOKA, H
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D O I
10.1016/S0376-7388(00)83170-1
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TQ [化学工业];
学科分类号
0817 ;
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页码:297 / 305
页数:9
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