HYDROGEN ADSORPTION ON SI(100)-2X1 SURFACES STUDIED BY ELASTIC RECOIL DETECTION ANALYSIS

被引：99

作者：

OURA, K

YAMANE, J

UMEZAWA, K

NAITOH, M

SHOJI, F

HANAWA, T

机构：

[1] Electron Beam Laboratory, Faculty of Engineering, Osaka University, Suita

来源：

PHYSICAL REVIEW B | 1990年 / 41卷 / 02期

关键词：

D O I：

10.1103/PhysRevB.41.1200

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Hydrogen adsorption on a clean Si(100)-2×1 surface has been studied by the high-energy ion- beam method (6-MeV F3+) combined with low-energy electron diffraction. We report that (1) the saturation coverage of hydrogen on a clean Si(100)-2×1 surface kept at room temperature is 1.850.18 monolayers (ML), and (2) the first 1-ML hydrogen adsorbs rather quickly, leading to a 2×1-H phase, while adsorption of more hydrogen beyond 1 ML occurs very slowly, approaching a saturated structure of 1×1-H. The effect of substrate temperatures on adsorption is also studied. © 1990 The American Physical Society.

引用

收藏

页码：1200 / 1203

页数：4

相关论文

共 16 条

[1] NEW ORDERED STRUCTURE FOR THE H-SATURATED SI(100) SURFACE - THE (3X1) PHASE [J].

CHABAL, YJ ;

RAGHAVACHARI, K .

PHYSICAL REVIEW LETTERS, 1985, 54 (10) :1055-1058

[2] HYDROGEN ADSORPTION ON SI(111)-(7X7) [J].

CULBERTSON, RJ ;

FELDMAN, LC ;

SILVERMAN, PJ ;

HAIGHT, R .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 20 (03) :868-871

[3] SI(001) SURFACE STUDIES USING HIGH-ENERGY ION-SCATTERING [J].

FELDMAN, LC ;

SILVERMAN, PJ ;

STENSGAARD, I .

NUCLEAR INSTRUMENTS & METHODS, 1980, 168 (1-3) :589-593

[4]

FROITZHEIM H, 1988, CHEM PHYSICS SOLID S, V5

[5] DETECTION OF ADSORBED HYDROGEN ON W(001) BY USING H-1(N-15,ALPHA-GAMMA)C-12 REACTION [J].

IWATA, Y ;

FUJIMOTO, F ;

VILALTA, E ;

OOTUKA, A ;

KOMAKI, K ;

KOBAYASHI, K ;

YAMASHITA, H ;

MURATA, Y .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1987, 26 (06) :L1026-L1028

[6] ACCURATE AND SENSITIVE METHOD FOR DETERMINATION OF DEPTH DISTRIBUTION OF LIGHT ELEMENTS IN HEAVY MATERIALS [J].

LECUYER, J ;

BRASSARD, C ;

CARDINAL, C ;

CHABBAL, J ;

DESCHENES, L ;

LABRIE, JP ;

TERREAULT, B ;

MARTEL, JG ;

STJACQUES, R .

JOURNAL OF APPLIED PHYSICS, 1976, 47 (01) :381-382

[7] STRUCTURAL AND ELECTRONIC MODEL OF NEGATIVE ELECTRON AFFINITY ON SI-CS-O SURFACE [J].

LEVINE, JD .

SURFACE SCIENCE, 1973, 34 (01) :90-107

[8] DEUTERIUM ON THE NI(111) SURFACE - AN ADSORPTION-POSITION DETERMINATION BY TRANSMISSION CHANNELING [J].

MORTENSEN, K ;

BESENBACHER, F ;

STENSGAARD, I ;

WAMPLER, WR .

SURFACE SCIENCE, 1988, 205 (03) :433-446

[9] HYDROGEN ADSORPTION ON SI(100) SURFACE STUDIED BY MEV ION-SCATTERING [J].

NARUSAWA, T ;

GIBSON, WM .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1980, 17 (01) :256-256

[10]

OURA K, UNPUB