Magnetic Bio-Sensor Using Planar Hall Effect

被引：0
作者：
Oh, SunJong
Tran Quang Hung
Kumar, Ananda S.
Kim, CheolGi
Kim, Dong Young
机构：
来源：
JOURNAL OF THE KOREAN SOCIETY FOR NONDESTRUCTIVE TESTING | 2008年 / 28卷 / 05期
关键词：
Bio-Sensor; Magnetic Bead; Magnetic Thin Film; PHR; Spin-Valve;
D O I：
暂无
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
The magnetic bio-sensor used the PHR (planar hall resistance) effect generated by the free layer in spin-valve giant magnetoresistance structure of Ta/NiFe/CoFe/Cu/NiFe/IrMn/Ta. The PHR element with micrometer size was fabricated through the photolithograph and dry etching process. The PHR signal with magnetic field was measured under the conditions of with and without single magnetic bead. A single magnetic bead of diameter 2.8. was successfully detected using the PHR sensor. Therefore, the high resolution PHR sensor can be applied to bio-sensor application utilizing the output voltage variation of the PHR signals in the presence and absence of a single magnetic bead.
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收藏
页码：421 / 426
页数：6
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