A NEW APPARATUS FOR MULTILAYER GROWTH BY CHEMICAL VAPOR-DEPOSITION - THE SLIDING-BOAT CLOSE-SPACED TECHNIQUE

被引:3
作者
YOSHIKAWA, A
YOSHIHARA, S
KASAI, H
NISHIMAKI, M
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10.1063/1.92062
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O59 [应用物理学];
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页码:732 / 734
页数:3
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