MAPPING PROJECTED POTENTIAL, INTERFACIAL ROUGHNESS, AND COMPOSITION IN GENERAL CRYSTALLINE SOLIDS BY QUANTITATIVE TRANSMISSION ELECTRON-MICROSCOPY

被引：82

作者：

SCHWANDER, P

KISIELOWSKI, C

SEIBT, M

BAUMANN, FH

KIM, Y

OURMAZD, A

机构：

[1] AT and T Bell Laboratories, Holmdel

来源：

PHYSICAL REVIEW LETTERS | 1993年 / 71卷 / 25期

关键词：

D O I：

10.1103/PhysRevLett.71.4150

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

We describe how general lattice images may be used to measure the variation of the potential in crystalline solids in any projection, with no knowledge of the imaging conditions. This approach is applicable to structurally perfect samples, in which interfacial topography or changes in composition are of interest. We present the first atomic-level topographic map of a Si/SiO2 interface in plan view, and the first microscopic compositional map of a Si/GeSi/Si quantum well in cross section.

引用

页码：4150 / 4153

页数：4

共 10 条

[1] QUANTITATIVE CHEMICAL MAPPING - SPATIAL-RESOLUTION
BAUMANN, FH
BODE, M
KIM, Y
OURMAZD, A
[J]. ULTRAMICROSCOPY, 1992, 47 (1-3) : 167 - 172
[2] STRUCTURE DETERMINATION OF PLANAR DEFECTS IN CRYSTALS OF GERMANIUM AND MOLYBDENUM BY HREM
BOURRET, A
ROUVIERE, JL
PENISSON, JM
[J]. ACTA CRYSTALLOGRAPHICA SECTION A, 1988, 44 : 838 - 847
[3] RESOLUTION OF OXYGEN-ATOMS IN STAUROLITE BY 3-DIMENSIONAL TRANSMISSION ELECTRON-MICROSCOPY
DOWNING, KH
HU, MS
WENK, HR
OKEEFE, MA
[J]. NATURE, 1990, 348 (6301) : 525 - 528
[4] KISIELOWSKI C, IN PRESS
[5] IMAGE LOCALIZATION
MARKS, LD
[J]. ULTRAMICROSCOPY, 1985, 18 (1-4) : 33 - 37
[6] OKEEFE MA, 1990, MATER RES SOC SYMP P, V159, P453
[7] CHEMICAL MAPPING OF SEMICONDUCTOR INTERFACES AT NEAR-ATOMIC RESOLUTION
OURMAZD, A
TAYLOR, DW
CUNNINGHAM, J
[J]. PHYSICAL REVIEW LETTERS, 1989, 62 (08) : 933 - 936
[8] QUANTIFYING THE INFORMATION-CONTENT OF LATTICE IMAGES
OURMAZD, A
TAYLOR, DW
BODE, M
KIM, Y
[J]. SCIENCE, 1989, 246 (4937) : 1571 - 1577
[9] CHEMICAL MAPPING AND ITS APPLICATION TO INTERFACES, POINT-DEFECTS AND MATERIALS PROCESSING
OURMAZD, A
[J]. MATERIALS SCIENCE REPORTS, 1993, 9 (06): : 201 - 250
[10] SPENCE JCH, 1981, EXPT HIGH RESOLUTION

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