ION-BEAM MIXING OF CHROMIUM ON SILICON DIOXIDE FILMS

被引：2

作者：

FREIRE, FL

机构：

[1] Departamento de Física, Pontifícia Universidade Católica do Rio de Janeiro, 22452-970 Rio de Janeiro

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1993年 / 83卷 / 03期

关键词：

D O I：

10.1016/0168-583X(93)95857-2

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Atomic mixing at the Cr/SiO2 interface induced by bombardment with noble gas ions (Ar, Kr and Xe) was studied using Rutherford backscattering spectrometry. The amount of mixing was determined as a function of fluence (1-20X10(15) ions/cm(2)), substrate temperature (300-800 K) and energy deposited in elastic collisions at the interface. Results for Cr/Al2O3 room-temperature ion mixing are also presented. The possible mechanisms of mass-transport through irradiated Cr/SiO2 interfaces are discussed.

引用

页码：361 / 365

页数：5

共 20 条

[1] ION-BEAM ENHANCEMENT OF METAL-INSULATOR ADHESION [J].

BAGLIN, JEE .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1992, 65 (1-4) :119-128

[2] ATOMIC TRANSPORT IN XE-IRRADIATED NI/SIO2 BILAYERS [J].

BANWELL, T ;

NICOLET, MA .

JOURNAL OF MATERIALS RESEARCH, 1988, 3 (06) :1072-1081

[3] CHEMICAL EFFECTS IN ION MIXING OF TRANSITION-METALS ON SIO2 [J].

BANWELL, T ;

LIU, BX ;

GOLECKI, I ;

NICOLET, MA .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 209 (MAY) :125-129

[4] ION-BEAM MIXING EFFECTS IN THE AR +-IRRADIATED FE/SIO2 SYSTEM [J].

BATTAGLIN, G ;

RUSSO, SL ;

PACCAGNELLA, A ;

PRINCIPI, G ;

ZHANG, PQ .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 27 (03) :402-409

[5] A SEARCH FOR A THERMAL SPIKE EFFECT IN SPUTTERING .1. TEMPERATURE-DEPENDENCE OF THE YIELD AT LOW-KEV, HEAVY-ION BOMBARDMENT [J].

BESOCKE, K ;

BERGER, S ;

HOFER, WO ;

LITTMARK, U .

RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1982, 66 (1-2) :35-41

[6]

BOHDANSKY J, 1987, NUCL INSTRUM METH B, V18, P509

[7] ION-BEAM MIXING OF CHROMIUM ON SILICON-NITRIDE CERAMICS [J].

BOLSE, W ;

PETEVES, SD ;

VREDENBERG, AM ;

SARIS, FW .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1992, 64 (1-4) :138-142

[8]

CHENG YT, 1990, MATER SCI REP, V5, P45, DOI DOI 10.1016/S0920-2307(05)80007-6

[9] ION-BEAM MIXING OF CERAMIC-METAL INTERFACES [J].

CORTS, T ;

TRAVERSE, A ;

BOLSE, W .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1993, 80-1 (pt 2) :167-171

[10] ROLE OF THERMAL SPIKES IN ENERGETIC DISPLACEMENT CASCADES [J].

DELARUBIA, TD ;

AVERBACK, RS ;

BENEDEK, R ;

KING, WE .

PHYSICAL REVIEW LETTERS, 1987, 59 (17) :1930-1933

← 1 2 →