FEMTOSECOND GAIN CHARACTERISTICS OF THE DISCHARGE-PUMPED ARF EXCIMER AMPLIFIER

被引：12
|
作者：
MOSSAVI, K
HOFMANN, T
SZABO, G
TITTEL, FK
机构：
[1] Department of Electrical and Computer Engineering, Rice Quantum Institute, Rice University, Houston, TX, 77251
来源：
OPTICS LETTERS | 1993年 / 18卷 / 06期
关键词：
D O I：
10.1364/OL.18.000435
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
The gain characteristics of a discharge-pumped ArF excimer amplifier are measured with approximately 700-fs-long pulses. The small-signal gain and saturation energy are found to be 0.17 cm-1 and 3.65 +/- 0.15 mJ/cm2, respectively. The maximum output energy density extracted from the deeply saturated amplifier is as much as 10 mJ/cm2. The demonstrated femtosecond gain characteristics of ArF indicate that, by utilizing sufficiently high seed pulse energies, the ArF excimer laser is expected to show a performance similar to a femtosecond high-brightness KrF excimer laser system.
引用
收藏
页码：435 / 437
页数：3
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