FEMTOSECOND GAIN CHARACTERISTICS OF THE DISCHARGE-PUMPED ARF EXCIMER AMPLIFIER

被引:11
作者
MOSSAVI, K
HOFMANN, T
SZABO, G
TITTEL, FK
机构
[1] Department of Electrical and Computer Engineering, Rice Quantum Institute, Rice University, Houston, TX, 77251
关键词
D O I
10.1364/OL.18.000435
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
The gain characteristics of a discharge-pumped ArF excimer amplifier are measured with approximately 700-fs-long pulses. The small-signal gain and saturation energy are found to be 0.17 cm-1 and 3.65 +/- 0.15 mJ/cm2, respectively. The maximum output energy density extracted from the deeply saturated amplifier is as much as 10 mJ/cm2. The demonstrated femtosecond gain characteristics of ArF indicate that, by utilizing sufficiently high seed pulse energies, the ArF excimer laser is expected to show a performance similar to a femtosecond high-brightness KrF excimer laser system.
引用
收藏
页码:435 / 437
页数:3
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