ANGULAR EFFECTS IN THE SPUTTERING OF STAINLESS-STEEL BY HYDROGEN-IONS

被引:3
作者
SMITH, JN
机构
[1] General Atomic Company, San Diego
关键词
D O I
10.1109/TNS.1979.4330371
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
One major source of plasma contamination in tokamaks results from sputtering of the first wall of the plasma chamber by hydrogenic species. Charge transfer neutrals and escaping ions will have different incident angle distributions and it is therefore important to study the angular behavior of the sputtering mechanism. Laboratory experiments are reported in which the angular and energy distribution of Cr+ sputtered from 304 stainless steel by H+3 is measured as a function of angle of incidence of the H+3 beam. A change in both the angular distribution and the energy distribution is observed toward grazing incidence, which is taken as evidence of the increasing contribution of surface recoils. The effects of surface contamination on the yield, angular distribution, and energy distribution of sputtered ions are also reported. Copyright © 1978 by The Institute of Electrical and Electronics Engineers, Inc.
引用
收藏
页码:1292 / 1295
页数:4
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