UNIFORMITY OF PHOSPHORUS EMITTER CONCENTRATION FOR SHALLOW DIFFUSED TRANSISTORS

被引：4
|
作者：
PAREKH, PC
机构：
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1972年 / 119卷 / 02期
关键词：
D O I：
10.1149/1.2404155
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
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页码：173 / &
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