MECHANISM OF ALKALI-PROMOTED OXIDATION OF SILICON

被引：53

作者：

ASENSIO, MC ^{[1
]}

MICHEL, EG ^{[1
]}

OELLIG, EM ^{[1
]}

MIRANDA, R ^{[1
]}

机构：

[1] UNIV AUTONOMA MADRID,FAC CIENCIAS,DEPT FIS MAT CONDENSADA C3,E-28049 MADRID,SPAIN

来源：

APPLIED PHYSICS LETTERS | 1987年 / 51卷 / 21期

关键词：

D O I：

10.1063/1.98553

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1714 / 1716

页数：3

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