THEORETICAL APPROACH UPON THE KINETIC OF GALLIUM-ARSENIDE EPITAXIAL DEPOSITION BY CVD-OM AND COMPARISON WITH EXPERIMENTAL RESULTS

被引：8
作者：
GAVE, G
LEMETAYER, M
BOUREE, JE
机构：
来源：
REVUE DE PHYSIQUE APPLIQUEE | 1979年 / 14卷 / 10期
关键词：
D O I：
10.1051/rphysap:019790014010087500
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：875 / 886
页数：12
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