DIFFUSION STUDIES OF AU THROUGH ELECTROPLATED PT FILMS BY AUGER-ELECTRON SPECTROSCOPY

被引：4

作者：

MCGUIRE, GE ^{[1
]}

WISSEMAN, WR ^{[1
]}

HOLLOWAY, PH ^{[1
]}

机构：

[1] SANDIA LABS,ALBUQUERQUE,NM 87115

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1978年 / 15卷 / 05期

关键词：

D O I：

10.1116/1.569831

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1701 / 1705

页数：5

共 28 条

[11] ANALYSIS OF GRAIN-BOUNDARY DIFFUSION IN THIN-FILMS - CHROMIUM IN GOLD [J].

HOLLOWAY, PH ;

AMOS, DE ;

NELSON, GC .

JOURNAL OF APPLIED PHYSICS, 1976, 47 (09) :3769-3775

[12]

HOLLOWAY PH, UNPUBLISHED

[13] FABRICATION AND NOISE PERFORMANCE OF HIGH-POWER GAAS IMPATTS [J].

IRVIN, JC ;

COLEMAN, DJ ;

JOHNSON, WA ;

TATSUGUC.I ;

DECKER, DR ;

DUNN, CN .

PROCEEDINGS OF THE INSTITUTE OF ELECTRICAL AND ELECTRONICS ENGINEERS, 1971, 59 (08) :1212-&

[14]

IRVIN JC, 1973, 4TH P BIENN CORN EL, P287

[15]

JOST W, 1960, DIFFUSION SOLIDS LIQ, P229

[16]

Mortlock A. J., 1960, PHILOS MAG, V5, P803

[17] HIGH-TEMPERATURE STABILITY OF AU PT-N-GAAS SCHOTTKY-BARRIER DIODES [J].

MURARKA, SP .

SOLID-STATE ELECTRONICS, 1974, 17 (08) :869-876

[18] FORWARD IV CHARACTERISTICS OF PT-N-GAAS SCHOTTKY-BARRIER CONTACTS [J].

MURARKA, SP .

SOLID-STATE ELECTRONICS, 1974, 17 (09) :985-991

[19]

NELSON GC, 1976, STP596 ASTM AM SOC T, P68

[20] DIFFUSION IN THIN-FILM COUPLES OF PLATINUM-GOLD [J].

NOWAK, WB ;

DYER, RN .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1972, 9 (01) :279-&

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