DIFFUSION STUDIES OF AU THROUGH ELECTROPLATED PT FILMS BY AUGER-ELECTRON SPECTROSCOPY

被引：4

作者：

MCGUIRE, GE ^{[1
]}

WISSEMAN, WR ^{[1
]}

HOLLOWAY, PH ^{[1
]}

机构：

[1] SANDIA LABS,ALBUQUERQUE,NM 87115

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1978年 / 15卷 / 05期

关键词：

D O I：

10.1116/1.569831

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1701 / 1705

页数：5

共 28 条

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