ANODIC-OXIDATION OF GAAS USING OXYGEN PLASMA

被引：24

作者：

YAMASAKI, K

SUGANO, T

机构：

来源：

关键词：

D O I：

10.7567/JJAPS.17S1.321

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：321 / 326

页数：6

共 6 条

[1] PLASMA OXIDATION OF GAAS [J].

CHANG, RPH ;

SINHA, AK .

[2] ANODIC-OXIDATION OF GAAS IN MIXED SOLUTIONS OF GLYCOL AND WATER [J].

HASEGAWA, H ;

HARTNAGEL, HL .

[3] THERMAL-OXIDATION OF GAAS [J].

KOSHIGA, F ;

SUGANO, T .

[4]

KOSHIGA F, 1976, 8TH P C SOL STAT DEV

SUGANO, T ;

MORI, Y .

[6] OXIDE FILMS GROWN ON GAAS IN AN OXYGEN PLASMA [J].

WEINREICH, OA .