THE USE OF VECTOR SCANNING FOR PRODUCING ARBITRARY SURFACE CONTOURS WITH A FOCUSED ION-BEAM

被引：15
作者：
CROW, G
PURETZ, J
ORLOFF, J
DEFREEZ, RK
ELLIOTT, RA
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1988年 / 6卷 / 05期
关键词：
D O I：
10.1116/1.584179
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
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页码：1605 / 1607
页数：3
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