FABRICATION OF INTEGRATED INJECTION LOGIC WITH ELECTRON-BEAM LITHOGRAPHY AND ION-IMPLANTATION

被引：23
作者：
EVANS, SA
BARTELT, JL
SLOAN, BJ
VARNELL, GL
机构：
来源：
IEEE TRANSACTIONS ON ELECTRON DEVICES | 1978年 / 25卷 / 04期
关键词：
D O I：
10.1109/T-ED.1978.19098
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：402 / 407
页数：6
相关论文
共 18 条
[1]   MERGED-TRANSISTOR LOGIC (MTL) - LOW-COST BIPOLAR LOGIC CONCEPT [J].
BERGER, HH ;
WIEDMANN, SK .
IEEE JOURNAL OF SOLID-STATE CIRCUITS, 1972, SC 7 (05) :340-&
[2]  
BERGER HH, 1975, 1974 IEEE INT SOL ST, P172
[3]   SUBSTRATE FED LOGIC [J].
BLATT, V ;
WALSH, PS ;
KENNEDY, LW .
IEEE JOURNAL OF SOLID-STATE CIRCUITS, 1975, 10 (05) :336-342
[4]  
COHEN E, 1976, ERLM592 SPICE PROGR
[5]   FOLDED-COLLECTOR INTEGRATED INJECTION LOGIC [J].
ELMASRY, MI .
IEEE JOURNAL OF SOLID-STATE CIRCUITS, 1976, 11 (05) :644-647
[6]   ANALYTIC MODEL FOR DESIGN AND OPTIMIZATION OF ION-IMPLANTED I2L DEVICES [J].
EVANS, SA .
IEEE JOURNAL OF SOLID-STATE CIRCUITS, 1977, 12 (02) :191-198
[7]  
EVANS SA, 1976, IEEE T ELECTRON DEVI, V22, P1192
[8]   INTEGRATED INJECTION LOGIC - NEW APPROACH TO LSI [J].
HART, K ;
SLOB, A .
IEEE JOURNAL OF SOLID-STATE CIRCUITS, 1972, SC 7 (05) :346-&
[9]   ISOPLANAR INTEGRATED INJECTION LOGIC - HIGH-PERFORMANCE BIPOLAR TECHNOLOGY [J].
HENNIG, F ;
HINGARH, HK ;
OBRIEN, D ;
VERHOFSTADT, PWJ .
IEEE JOURNAL OF SOLID-STATE CIRCUITS, 1977, 12 (02) :101-109
[10]   2ND-GENERATION 12L-MTL - 20-NS PROCESS-STRUCTURE [J].
HERMAN, JM ;
EVANS, SA ;
SLOAN, BJ .
IEEE JOURNAL OF SOLID-STATE CIRCUITS, 1977, 12 (02) :93-101
12