IR-SPECTRA OF SI3N4 FILMS, DEPOSITED FROM SICL4-NH3 AND SIH4-NH3 SYSTEMS

被引：0
|
作者：
POPOVA, LI [1 ]
ROGALSKA, KP [1 ]
机构：
[1] INST MICROELECTR,SOFIA,BULGARIA
来源：
DOKLADI NA BOLGARSKATA AKADEMIYA NA NAUKITE | 1976年 / 29卷 / 08期
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D O I：
暂无
中图分类号：
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号：
07 ; 0710 ; 09 ;
摘要：
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页码：1113 / 1115
页数：3
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