ROOM-TEMPERATURE FORMATION AND STABILITY OF COMPOUNDS IN METAL COUPLES OF BULK-FILM TYPE

被引：2
作者：
SIMIC, V
MARINKOVIC, Z
机构：
来源：
THIN SOLID FILMS | 1994年 / 249卷 / 02期
关键词：
D O I：
10.1016/0040-6090(94)90756-0
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The results of an investigation of room temperature compound formation in previously uninvestigated metal couples of bulk-film type are presented. In fresh specimens of 10 couples with an evaporated film, seven compounds have been formed, and in fresh specimens of 16 couples with a sputtered film, 13 compounds have been formed. Results of examination of the specimens after ageing for 5-8 years are also presented and compared with the results obtained from the fresh specimens. The analysis shows: (a) a smaller number of compounds is formed in fresh specimens of bulk-film type than in the corresponding film-film type specimens; (b) instability of the compounds during the long ageing period is caused by their transformation, decomposition with amorphization of the low-melting constituent, or by the influence of the atmosphere; (c) compounds formed in specimens containing a sputtered film art more resistant to ageing than those in specimens with an evaporated film.
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页码：168 / 173
页数：6
相关论文
共 12 条
[1]   STUDY ON VACUUM DEPOSITION OF METALS .1. ON THE FORMATION OF ALLOYS BY SUCCESSIVE DEPOSITION OF CONSTITUENT METAL VAPOURS IN VACUUM [J].
FUJIKI, Y .
JOURNAL OF THE PHYSICAL SOCIETY OF JAPAN, 1959, 14 (07) :913-917
[2]  
HEURLE FM, 1985, THIN SOLID FILMS, V128, P283
[3]   FORMATION OF INTERMETALLIC COMPOUNDS IN AL THIN-FILMS VAPOR-DEPOSITED ON AU PLATE [J].
KATO, H .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1987, 26 (10) :1786-1790
[4]   INTERFACE REACTIONS OF COPPER-FILMS WITH POLYCRYSTALLINE INDIUM OR ANTIMONY AND SINGLE-CRYSTAL INSB SUBSTRATES [J].
MARINKOVIC, Z ;
SIMIC, V .
THIN SOLID FILMS, 1985, 129 (3-4) :315-320
[5]   REACTIONS OF RF-SPUTTERED COPPER LAYERS WITH CD,GA,GE,SN AND ZN [J].
SIMIC, V ;
MARINKOVIC, Z .
JOURNAL OF THE LESS-COMMON METALS, 1986, 116 (02) :L7-L12
[6]   REACTIONS IN THIN TI METAL COUPLES DURING RF-SPUTTERING [J].
SIMIC, V ;
MARINKOVIC, Z .
THIN SOLID FILMS, 1990, 191 (01) :165-171
[7]   STABILITY OF COMPOUNDS IN THIN-FILM METAL COUPLES IN THE COURSE OF LONG AGING AT ROOM-TEMPERATURE [J].
SIMIC, V ;
MARINKOVIC, Z .
THIN SOLID FILMS, 1992, 209 (02) :181-187
[8]   REACTIONS OF R-F-SPUTTERED CHROMIUM FILMS WITH GALLIUM AND TIN [J].
SIMIC, V ;
MARINKOVIC, Z .
THIN SOLID FILMS, 1989, 176 (02) :L173-L176
[9]   POSSIBILITY OF AND CONDITIONS FOR THE ROOM-TEMPERATURE FORMATION OF COMPOUNDS AT THE BULK METAL THIN METAL-FILM INTERFACE [J].
SIMIC, V ;
MARINKOVIC, Z .
JOURNAL OF THE LESS-COMMON METALS, 1983, 95 (02) :259-265
[10]   INFLUENCE OF SPUTTERING OF THE FILMS ON COMPOUND FORMATION IN FILM FILM AND BULK FILM SYSTEMS [J].
SIMIC, V ;
MARINKOVIC, Z .
JOURNAL OF THE LESS-COMMON METALS, 1985, 106 (02) :287-292
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