QUANTITATIVE INTERPRETATION OF AUGER SPUTTER PROFILES OF THIN-LAYERS

被引：29
作者：
MITCHELL, DF
机构：
来源：
APPLIED SURFACE SCIENCE | 1981年 / 9卷 / 1-4期
关键词：
D O I：
10.1016/0378-5963(81)90032-5
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
收藏
页码：131 / 140
页数：10
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