STRUCTURAL TRANSITIONS IN BALLISTIC AGGREGATION SIMULATION OF THIN-FILM GROWTH

被引：27
作者：
BRETT, MJ
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1988年 / 6卷 / 03期
关键词：
D O I：
10.1116/1.575285
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
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页码：1749 / 1751
页数：3
相关论文
共 15 条
[1]   SIMULATION OF STRUCTURAL ANISOTROPY AND VOID FORMATION IN AMORPHOUS THIN-FILMS [J].
HENDERSON, D ;
BRODSKY, MH ;
CHAUDHARI, P .
APPLIED PHYSICS LETTERS, 1974, 25 (11) :641-643
[2]  
Leamy H. J., 1980, Current topics in materials science. Vol.6, P309
[3]  
MEAKIN P, 1987, CRIT REV SOLID STATE, V13, P143
[4]   REVISED STRUCTURE ZONE MODEL FOR THIN-FILM PHYSICAL STRUCTURE [J].
MESSIER, R ;
GIRI, AP ;
ROY, RA .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1984, 2 (02) :500-503
[5]  
MOVCHAN BA, 1969, PHYS METALS METALLOG, V28, P83
[6]  
MULLER KH, 1987, J VAC SCI TECHNOL A, V5, P2161, DOI 10.1116/1.574945
[7]  
MULLER KH, 1985, J APPL PHYS, V58, P2573, DOI 10.1063/1.335885
[8]  
MULLER KH, 1986, J VAC SCI TECHNOL A, V4, P184, DOI 10.1116/1.573468
[9]  
NIEUWENHUIZEN JM, 1966, PHILIPS TECH REV, V27, P87
[10]   THEORY OF SPUTTERING .I. SPUTTERING YIELD OF AMORPHOUS AND POLYCRYSTALLINE TARGETS [J].
SIGMUND, P .
PHYSICAL REVIEW, 1969, 184 (02) :383-+
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