SURFACE-ROUGHNESS IN THIN-FILM GROWTH - THE EFFECT OF MASS-TRANSPORT BETWEEN LAYERS

被引:69
作者
ZHANG, ZY
DETCH, J
METIU, H
机构
[1] UNIV CALIF SANTA BARBARA, CTR QUANTIZED ELECTR STRUCT QUEST, SANTA BARBARA, CA 93106 USA
[2] UNIV CALIF SANTA BARBARA, DEPT PHYS, SANTA BARBARA, CA 93106 USA
[3] UNIV CALIF SANTA BARBARA, DEPT CHEM, SANTA BARBARA, CA 93106 USA
来源
PHYSICAL REVIEW B | 1993年 / 48卷 / 07期
关键词
D O I
10.1103/PhysRevB.48.4972
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We present one-dimensional simulations using kinetic parameters and deposition conditions typical to epitaxy. We study how various microscopic kinetic parameters influence surface morphology and test scaling predictions made by continuum theories.
引用
收藏
页码:4972 / 4975
页数:4
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