PLASMA DEPOSITION AND PROPERTIES OF COMPOSITE METAL POLYMER AND METAL HARD CARBON-FILMS

被引：38
|
作者：
BIEDERMAN, H
MARTINU, L
SLAVINSKA, D
CHUDACEK, I
机构：
来源：
PURE AND APPLIED CHEMISTRY | 1988年 / 60卷 / 05期
关键词：
D O I：
10.1351/pac198860050607
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
引用
收藏
页码：607 / 618
页数：12
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