PLASMA DEPOSITION AND PROPERTIES OF COMPOSITE METAL POLYMER AND METAL HARD CARBON-FILMS

被引：38

作者：

BIEDERMAN, H

MARTINU, L

SLAVINSKA, D

CHUDACEK, I

机构：

来源：

PURE AND APPLIED CHEMISTRY | 1988年 / 60卷 / 05期

关键词：

D O I：

10.1351/pac198860050607

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

引用

收藏

页码：607 / 618

页数：12

相关论文

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