CALCULATION OF CONTACT CURRENTS IN DEVICE SIMULATION

被引:5
作者
NANZ, G
DICKINGER, P
SELBERHERR, S
机构
[1] Institute for Microelectronics, Technical University Vienna, Vienna
关键词
D O I
10.1109/43.108625
中图分类号
TP3 [计算技术、计算机技术];
学科分类号
0812 ;
摘要
We present an accurate new method for the calculation of the contact currents in a device simulation program which is applicable to arbitrarily shaped device geometries. The method is based on the evaluation of a volume integral of the calculated current densities over the whole device area with a suitably chosen weight function. Different types of weight functions are discussed and compared with the commonly used line integral along the contact. The results are illustrated by three examples: an I2L memory cell, an MOS transistor, and a resistor with a reverse-biased diode.
引用
收藏
页码:128 / 136
页数:9
相关论文
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