PHYSICS OF METAL ORGANIC-CHEMICAL VAPOR-DEPOSITION

被引：4
|
作者：
RICHTER, W
机构：
来源：
FESTKORPERPROBLEME-ADVANCES IN SOLID STATE PHYICS | 1986年 / 26卷
关键词：
D O I：
10.1007/BFb0107803
中图分类号：
O469 [凝聚态物理学];
学科分类号：
070205 ;
摘要：
引用
收藏
页码：335 / 359
页数：25
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