ANODIC-OXIDATION OF SILICON IN ORGANIC BATHS CONTAINING FLUORINE

被引：20

作者：

CROSET, M ^{[1
]}

DIEUMEGA.D ^{[1
]}

机构：

[1] THOMSON-CSF,LAB CENT RECH,ORSAY 91,FRANCE

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1973年 / 120卷 / 04期

关键词：

D O I：

10.1149/1.2403494

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：526 / 532

页数：7

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