DESIGN FOR A HIGH-TEMPERATURE, HIGH-VACUUM EVAPORATION FURNACE

被引:2
作者
WEST, KW
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1980年 / 17卷 / 06期
关键词
D O I
10.1116/1.570679
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:1382 / 1383
页数:2
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