DESIGN FOR A HIGH-TEMPERATURE, HIGH-VACUUM EVAPORATION FURNACE

被引：2
作者：
WEST, KW
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1980年 / 17卷 / 06期
关键词：
D O I：
10.1116/1.570679
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：1382 / 1383
页数：2
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