DESIGN FOR A HIGH-TEMPERATURE, HIGH-VACUUM EVAPORATION FURNACE

被引：2

作者：

WEST, KW

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1980年 / 17卷 / 06期

关键词：

D O I：

10.1116/1.570679

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1382 / 1383

页数：2

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