CHANGES IN THE STRUCTURAL-PROPERTIES OF A SI(111) SURFACE DURING ION-BOMBARDMENT, AS REVEALED BY AUGER-ELECTRON SPECTROSCOPY

被引：12

作者：

MORGEN, P

RYBORG, F

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1980年 / 17卷 / 02期

关键词：

Compendex;

D O I：

10.1116/1.570518

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

SEMICONDUCTING SILICON

引用

收藏

页码：578 / 581

页数：4

相关论文

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