CHANGES IN THE STRUCTURAL-PROPERTIES OF A SI(111) SURFACE DURING ION-BOMBARDMENT, AS REVEALED BY AUGER-ELECTRON SPECTROSCOPY

被引：12
作者：
MORGEN, P
RYBORG, F
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1980年 / 17卷 / 02期
关键词：
Compendex;
D O I：
10.1116/1.570518
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
SEMICONDUCTING SILICON
引用
收藏
页码：578 / 581
页数：4
相关论文
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