WALL COLLISIONS, ANGULAR FLUX, AND PUMPING REQUIREMENTS IN MOLECULAR-FLOW THROUGH TUBES AND MICROCHANNEL ARRAYS

被引：17

作者：

MURPHY, DM

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 05期

关键词：

D O I：

10.1116/1.576317

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：3075 / 3091

页数：17

共 20 条

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