A COMPUTERIZED END-STATION FOR A HIGH-CURRENT ION IMPLANTER

被引：8

作者：

TORP, B

ABRAHAMSEN, P

ERIKSEN, S

NIELSEN, BR

机构：

[1] Danfysik A/S

来源：

SURFACE & COATINGS TECHNOLOGY | 1992年 / 51卷 / 1-3期

关键词：

D O I：

10.1016/0257-8972(92)90298-O

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

A new computerized end-station has been developed to improve the efficiency and quality of ion implantation for materials modification. The system consists of six stepping motors and two scanning magnets, which can be individually controlled. In order to ensure synchronization the time dependence of all movements and magnetic fields is derived from the same time base. The system is controlled from a 386-computer. Two examples illustrating the operation of this system are presented. One is the implantation of outer races for ball bearings. The effective implantation time is reduced in this example by a factor of 9. The other example is the implantation of complex geometries, in this case an elliptical item. By programming the angular speed, tools with complex shape may be implanted homogeneously.

引用

页码：556 / 560

页数：5

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