RF GLOW-DISCHARGE SPUTTERING MODEL

被引：21

|

作者：

LOGAN, JS ^{[1
]}

KELLER, JH ^{[1
]}

SIMMONS, RG ^{[1
]}

机构：

[1] IBM CORP,DIV SYST PROD,HOPEWELL JUNCTION,NY 12533

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1977年 / 14卷 / 01期

关键词：

D O I：

10.1116/1.569181

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：92 / 97

页数：6

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