RUTHERFORD SCATTERING STUDY OF DIFFUSION OF HEAVY-METAL IMPURITIES IN SILICON TO ION-DAMAGED SURFACE-LAYERS

被引：44
作者：
BUCK, TM [1 ]
POATE, JM [1 ]
PICKAR, KA [1 ]
HSIEH, CM [1 ]
机构：
[1] BELL TEL LABS INC,MURRAY HILL,NJ 07974
来源：
SURFACE SCIENCE | 1973年 / 35卷 / 01期
关键词：
D O I：
10.1016/0039-6028(73)90225-2
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
收藏
页码：362 / 379
页数：18
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