Synthesis and characterization of LiCoO2 thin film by sol-gel process

LiCoO2 thin film has received diverse attention as cathodes material of thin-film micro-batteries. In this study, LiCoO2 thin films were synthesized on Au substrates by sol-gel spin coating method and an annealing process. Their structures were studied using X-ray diffraction and Raman Spectroscopy. The particle morphologies of these thin films were observed by Scaning electron microscope. From the results of X-ray diffractometry and Raman Spectroscopy analyses, it was found that as-grown films had the structure of spinel (LT-LiCoO2) and layered-Rock-salt (HT-LiCoO2) at 550 o C and 750 degrees C respectively. The annealed films at 650 degrees C were presumed to be the mixed state of these two types. Throlugh the scanning electron microscope, It was estimated that the particle size in as-grown films at 750 degrees C, were larger crystilline particle than in those at the other lower temperature and well distributed in the film.