CONCEPT OF AN IMAGING XPS SYSTEM

被引：40
|
作者：
SEAH, MP
SMITH, GC
机构：
来源：
SURFACE AND INTERFACE ANALYSIS | 1988年 / 11卷 / 1-2期
关键词：
D O I：
10.1002/sia.740110109
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
收藏
页码：69 / 79
页数：11
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