IMPROVING THE ACCURACY OF DETERMINATION OF LINE ENERGIES BY ESCA - CHEMICAL-STATE PLOTS FOR SILICON ALUMINUM COMPOUNDS

被引：130
作者：
WAGNER, CD
SIX, HA
JANSEN, WT
TAYLOR, JA
机构：
[1] PERKIN ELMER CORP,DIV PHYS ELECTR,MT VIEW,CA 94043
[2] PERKIN ELMER CORP,DIV PHYS ELECTR,EDEN PRAIRIE,MN 55344
来源：
APPLIED SURFACE SCIENCE | 1981年 / 9卷 / 1-4期
关键词：
D O I：
10.1016/0378-5963(81)90037-4
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
收藏
页码：203 / 213
页数：11
相关论文
共 12 条
[1]   ENERGY CALIBRATION IN ELECTRON-SPECTROSCOPY AND THE RE-DETERMINATION OF SOME REFERENCE ELECTRON-BINDING ENERGIES [J].
BIRD, RJ ;
SWIFT, P .
JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1980, 21 (03) :227-240
[2]   BREMSSTRAHLUNG-INDUCED AUGER PEAKS [J].
CASTLE, JE ;
WEST, RH .
JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1980, 18 (04) :355-358
[3]  
CASTLE JE, 1980, J ELECTRON SPECTROSC, V20, P83
[4]   ELECTRON ESCAPE DEPTH IN SILICON [J].
KLASSON, M ;
BERNDTSSON, A ;
HEDMAN, J ;
NILSSON, R ;
NYHOLM, R ;
NORDLING, C .
JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1974, 3 (06) :427-434
[5]   SURFACE CHARACTERIZATION OF CATALYSTS USING ELECTRON SPECTROSCOPIES - RESULTS OF A ROUND-ROBIN SPONSORED BY ASTM-COMMITTEE D-32 ON CATALYSTS [J].
MADEY, TE ;
WAGNER, CD ;
JOSHI, A .
JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1977, 10 (04) :359-388
[6]   REACTION OF N2-(+) BEAMS WITH ALUMINUM SURFACES [J].
TAYLOR, JA ;
RABALAIS, JW .
JOURNAL OF CHEMICAL PHYSICS, 1981, 75 (04) :1735-1745
[7]   FURTHER EXAMINATION OF THE SI KLL AUGER LINE IN SILICON-NITRIDE THIN-FILMS [J].
TAYLOR, JA .
APPLIED SURFACE SCIENCE, 1981, 7 (1-2) :168-184
[8]  
Wagner C., 1979, HDB XRAY PHOTOELECTR
[9]   X-RAY PHOTOELECTRON-SPECTROSCOPY WITH X-RAY PHOTONS OF HIGHER ENERGY [J].
WAGNER, CD .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1978, 15 (02) :518-523
[10]   GENERATION OF XPS AUGER LINES BY BREMSSTRAHLUNG [J].
WAGNER, CD ;
TAYLOR, JA .
JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1980, 20 (1-2) :83-93
12