A REVIEW OF SURFACE SPECTROSCOPIES FOR SEMICONDUCTOR CHARACTERIZATION

被引：17
作者：
HELMS, CR
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1982年 / 20卷 / 04期
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D O I：
10.1116/1.571650
中图分类号：
O59 [应用物理学];
学科分类号：
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页码：948 / 952
页数：5
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