A REVIEW OF SURFACE SPECTROSCOPIES FOR SEMICONDUCTOR CHARACTERIZATION

被引:17
作者
HELMS, CR
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1982年 / 20卷 / 04期
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D O I
10.1116/1.571650
中图分类号
O59 [应用物理学];
学科分类号
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页码:948 / 952
页数:5
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