MIGRATION OF OXYGEN DURING ANODIC-OXIDATION OF TANTALUM

被引：68

作者：

PRINGLE, JPS ^{[1
]}

机构：

[1] ATOM ENERGY CANADA LTD,CHALK RIVER NUCL LABS,CHALK RIVER,ONTARIO,CANADA

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1973年 / 120卷 / 10期

关键词：

D O I：

10.1149/1.2403268

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：1391 / 1400

页数：10

共 19 条

[1] MECHANISM OF ANODIC OXIDATION [J].

AMSEL, G ;

SAMUEL, D .

JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1962, 23 (DEC) :1707-&

[2]

Boltaks B.I., 1963, DIFFUSION SEMICONDUC

[3] 3 ABSOLUTE ENERGY CALIBRATION POINTS FOR PROTONS BELOW 3 MEV [J].

BONDELID, RO ;

BUTLER, JW .

NUCLEAR PHYSICS, 1964, 53 (04) :618-&

[4] ANALYSIS OF THIN FILMS BY ION MICROPROBE MASS SPECTROMETRY [J].

EVANS, CA ;

PEMSLER, JP .

ANALYTICAL CHEMISTRY, 1970, 42 (09) :1060-&

[5]

HANSEN LF, 1962, PHYS REV, V30, P389

[6] YIELDS OF THE O18(P,ALPHA)N15 AND O18(P,N)F18 REACTIONS FOR PROTONS OF 800 KEV TO 3500 KEV [J].

HILL, HA ;

BLAIR, JM .

PHYSICAL REVIEW, 1956, 104 (01) :198-201

[7]

Kirkendall EO, 1942, T AM I MIN MET ENG, V147, P104

[8] NUCLEAR STUDY OF FLUORINE CONTAMINATION OF TANTALUM BY VARIOUS POLISHING PROCEDURES AND OF ITS BEHAVIOR DURING SUBSEQUENT ANODIC-OXIDATION [J].

MAUREL, B ;

AMSEL, G ;

DIEUMEGARD, D .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1972, 119 (12) :1715-+

[9] A METHOD OF UTILIZING NUCLEAR REACTIONS IN STUDY OF OXIDE LAYERS [J].

OLLERHEAD, RW ;

ALMQVIST, E ;

KUEHNER, JA .

JOURNAL OF APPLIED PHYSICS, 1966, 37 (06) :2440-+

[10]

ORTEGA C, 1971, OCT P EL SOC M CLEV, P221

← 1 2 →