MONTE-CARLO MODELING OF CURRENT DISTRIBUTION IN SHAPED ELECTRON-BEAMS

被引:8
作者
DAYAN, PS
JONES, GAC
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1981年 / 19卷 / 04期
关键词
D O I
10.1116/1.571175
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:1094 / 1097
页数:4
相关论文
共 4 条
[1]  
CREWE AV, 1978, OPTIK, V52, P337
[2]   ELECTRON-BEAM BROADENING EFFECTS CAUSED BY DISCRETENESS OF SPACE-CHARGE [J].
GROVES, T ;
HAMMOND, DL ;
KUO, H .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (06) :1680-1685
[3]  
LAUER R, 1966, 6TH P INT C EL MICR, P129
[4]  
LOEFFLER KH, 1970, 10TH P INT C EL MICR, P135