MOSFETS ON SILICON PREPARED BY MOVING MELT ZONE RECRYSTALLIZATION OF ENCAPSULATED POLYCRYSTALLINE SILICON ON AN INSULATING SUBSTRATE

被引：74

作者：

MABY, EW ^{[1
]}

GEIS, MW ^{[1
]}

LECOZ, YL ^{[1
]}

SILVERSMITH, DJ ^{[1
]}

MOUNTAIN, RW ^{[1
]}

ANTONIADIS, DA ^{[1
]}

机构：

[1] MIT,LINCOLN LAB,LEXINGTON,MA 02173

来源：

ELECTRON DEVICE LETTERS | 1981年 / 2卷 / 10期

关键词：

D O I：

10.1109/EDL.1981.25418

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：241 / 243

页数：3

共 19 条

[1] Biegelsen D. K., 1981, Laser and Electron-Beam Solid Interactions and Materials Processing. Proceedings of the Materials Research Society Symposium, P487
[2] LASER-INDUCED CRYSTALLIZATION OF SILICON ISLANDS ON AMORPHOUS SUBSTRATES - MULTILAYER STRUCTURES
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JOHNSON, NM
BARTELINK, DJ
MOYER, MD
[J]. APPLIED PHYSICS LETTERS, 1981, 38 (03) : 150 - 152
[3] Fan J. C. C., 1980, Fourteenth IEEE Photovoltaic Specialists Conference 1980, P218
[4] LATERAL EPITAXY BY SEEDED SOLIDIFICATION FOR GROWTH OF SINGLE-CRYSTAL SI FILMS ON INSULATORS
FAN, JCC
GEIS, MW
TSAUR, BY
[J]. APPLIED PHYSICS LETTERS, 1981, 38 (05) : 365 - 367
[5] SOLID-PHASE GROWTH OF LARGE ALIGNED GRAINS DURING SCANNED LASER CRYSTALLIZATION OF AMORPHOUS-GE FILMS ON FUSED-SILICA
FAN, JCC
ZEIGER, HJ
GALE, RP
CHAPMAN, RL
[J]. APPLIED PHYSICS LETTERS, 1980, 36 (02) : 158 - 161
[6] CRYSTALLIZATION OF AMORPHOUS SILICON FILMS BY ND-YAG LASER-HEATING
FAN, JCC
ZEIGER, HJ
[J]. APPLIED PHYSICS LETTERS, 1975, 27 (04) : 224 - 226
[7] CW LASER ANNEAL OF POLYCRYSTALLINE SILICON - CRYSTALLINE-STRUCTURE, ELECTRICAL-PROPERTIES
GAT, A
GERZBERG, L
GIBBONS, JF
MAGEE, TJ
PENG, J
HONG, JD
[J]. APPLIED PHYSICS LETTERS, 1978, 33 (08) : 775 - 778
[8] GAT A, COMMUNICATION
[9] CRYSTALLOGRAPHIC ORIENTATION OF SILICON ON AN AMORPHOUS SUBSTRATE USING AN ARTIFICIAL SURFACE-RELIEF GRATING AND LASER CRYSTALLIZATION
GEIS, MW
FLANDERS, DC
SMITH, HI
[J]. APPLIED PHYSICS LETTERS, 1979, 35 (01) : 71 - 74
[10] SILICON GRAPHOEPITAXY USING A STRIP-HEATER OVEN
GEIS, MW
ANTONIADIS, DA
SILVERSMITH, DJ
MOUNTAIN, RW
SMITH, HI
[J]. APPLIED PHYSICS LETTERS, 1980, 37 (05) : 454 - 456

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